Слайд 1Specimen Preparation
for SEM
investigation
prof. dr habil. ing. Włodzimierz Dudziński
Слайд 2Presentation program
Aim of SEM investigation
Investigated materials
Condition for specimens
Preparation
Specimen fixation
Replica
Examples
Слайд 3Aim of SEM investigation
Materials are investigated for:
Mikrostructure determination (SE, BSE,
AE, EBSD – Electron Beam Selected Diffraction)
Chemical composition: (EDS, BSE,AE)
Слайд 4Analytical SEM JEOL JSM-6610A
Слайд 6Types of specimens for SEM investigation
Four types of specimens:
1. Metalic
2.
Polymer
3. Biological
4. Geological
Слайд 7Metalic specimens
For current conductive metalic specimens any additional preparation is
not necessary.
They can be investigated like specimens for macro or
metallography research.
Specimen can be at polished or tobe at etched state.
It is only necessary to fix
the specimen with appropriate
holder.
Слайд 8Specimens from polymers and composites
Polymer specimens must be sputtered by
the layer of current conductive elements like: C, Au, Pt,
Cu.
Слайд 9Biological specimens
Living cells, biological tissue, and some organs needs to
be specially prepared for the reason their fixation and protection
to stabilize them and to protect against the ravages of the electron beam.
SEM image of pollen before and after graphic processing
Слайд 10Biological specimens
Biological specimens must be:
Dried, because inside the SEM chamber
the material will be in the vacuum and therefore can
not be inserted preparations hydrated.
Sputered by current conductive material. Carbon is the best.
Слайд 12Samples of powder sputerred by gold
Слайд 13Biological specimens covered by gold
Слайд 14Specimen size
Specime sizes are limited by dimensions of SEM support
table. Typical values are:
- Diameter below 5cm,
- Highest below 2,5cm.
Typical
dimensions are: 10 x 10 x 5 mm.
Слайд 15Specimens embeding
Specimens are embeded at epoxy resin for the reason
of better mounting and correction of specimen quality.
Before mounting specimens
must be cleaned, free of dust, grease and any impurities.
Two techniques can be applied:
Hot embeding under the pressure,
Cold embeding.
Слайд 16Specimen embeding
„Cold embeding” is suitable for materials sensitive at high
temperature and pressure. Special epoxy or acryl resines are applied.
„Hot
embeding” is suitable in the case when high quality of specimen preparation, equal size, shape and short time preparation is necessary. This process is realized by special equipment, (hot temperature press pressure).
Слайд 17Electrical current conductivity
Specimens analyzed by SEM methods must conduct electrical
current.
If specimen doesn’t conduct electrical current, then must be
covered by the layer of Au, Pt, C or Cu.
Such prepared specimens can be investigated at high or low vacuum.
Слайд 18Specimen preparation
Cutting, to obtain dimensions limited by support table disposed
inside specimen chamber
Cleaning and degreasing of specimen surfaces
Grinding
Polishing
Etching
Слайд 19Specimen preparation
Grinding, by using special waterproof fine grain grinding papers.
Слайд 20Specimen preparation
Mechanical polishing by using special velvet tissue immersed by
diamant paste or water suspension of Al2O3. Any traces of
scratches must be eliminated. Specimen surface must be brillant.
Слайд 21Specimen preparation
Etching is the last operation necessary for microstructure visualisation.
It is realised by application chemical reagent on the surface
of polished specimen.
Слайд 24Cross Section Polisher SM-09010
Cross Section Polisher,
makes cross section
perpendicullar
to the
specimen surface.
It is suitable for investigation
of multilayer structures.
Слайд 25Cross Section Polisher SM-09010
Principle of operation
.
Слайд 27Specimens cutting
Saw equipment for sample
precission cutting
Слайд 28 Examples of SEM application
Granulated
medicine
Слайд 29Examples of SEM application
Paper
Cross-section
Слайд 30Evaporisation / sputerring
Is realised for covering
the surface specimen
by C, Au,
Pt or Cu
at high vacuum
using special equipment.
Слайд 33Specimen fixation
Current conductive
plasticine
Sticky carbon discs
Слайд 34Specimen fixation
Double Scotch tape
Silver glue
Слайд 37Replica
The aim is to obtain direct microstructure of construction elements
without their cutting or destruction.
Advantages:
Non destructive method (without decrising the
strength of investigated elements).
Disadvantages:
The abbility to study only the outer surface layer (cannot be representative for whole volume / thickness of investigated material).
Слайд 41Examples
Surface of ceramic powder
Cross section of ceramic powder